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  • AC/DC power supply / linear / tabletop / high-frequency

1.5 - 10 kW, 13 600 kHz | Apex® series

Article: 00208532

AC/DC power supply / linear / tabletop / high-frequency

The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform ...

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