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Air filter accessories: frames, housings, cartridges...

Entegris

  • HEPA filter housing / air / steel

E2600

Article: 00004344

HEPA filter housing / air / steel

E2600 Filter Housing for DUV, EUV Scanners
Advanced protection for optics and resists

Hybrid media chemical air filters remove a full range of contaminants including acids, bases and condensable organics
Internal HEPA filters ensure particle control
Interstack sample ports allow filter performance monitoring, breakthrough-warming and intelligent filter change-out planning
Small footprint saves cleanroom space
Rigid construction ensures reliable, trouble-free operation
Chemically clean construction materials ensure contamination-free air to the process tool
Dual inlet and outlet transitions for simple, hard or flexible duct connection to process tool air handling systems

Specifications

  • Fluid: air
  • Filter type: HEPA
  • Material: steel
  • Flow rate: 2600 m³/h (91818.13 ft³/h)
  • Operating temperature: 150 °C (302 °F)

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