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  • Excimer laser / ArF / ultraviolet / for photolithography

193 nm, 11.25 mJ | XLA 105 HP

Article: 00173460

Excimer laser / ArF / ultraviolet / for photolithography

Providing leading edge optical and power performance now and in the future The XLA 105 HP is a productivity improvement of the XLA 105 that extends the gas lifetime of the current system. Additionally, this High-Performance laser is ...

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