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  • EMCP plasma engraving system / not applicable / for non-volatile materials

E-600/8000 Series

Article: 00170935

EMCP plasma engraving system / not applicable / for non-volatile materials

The next generation memories supported by this product include MRAM (*3) and FeRAM (*4), which require etching novel, non-volatile materials. The adhesive byproducts located inside the etch chamber often lead to significant loss of productivity ...

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