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Motorized 2-axis Linear Positioning Stages

Alio

Article: 00089660

Rotary positioning stage / motorized / XY / open-center

Position feedback systems in a vacuum chamber have special designs to insure performance and no outgassing. The styles discussed are three of many approaches but these are tried and proven to perform at single nanometer resolutions in UHV.

Optical encoders, based on reading a physical scale, can resolve down to the nanometer level. Although the scale has a 20 micron pitch, the signal has a sufficient signal to noise ratio to allow it to be interpolated down to the single digit nanometer. (2.5nm to 5 nm resolutions depending on interpolator) These encoders work well for most applications were cost and repeatability is needed.

The next level of performance to an optical encoder with tape or glass scale utilizes a similar read head with a novel scale. Although using the same 20um pitch, it is etched directly into the stainless steel of a ring, for rotary applications, or onto a nickel plated invar spar for linear applications. The Invar scale allows for near laser precision with repeatability and accuracy due to the manufacturing technique of calibrating it with an interferometer. Placing the scale on invar greatly reduces thermal effect that influences the accuracy of other scales.

Beyond optical scale encoders, a laser interferometer can be used to provide resolutions to 38 picometers. This can provide positioning stability, on a suitable mechanical system, to the sub-nanometer levels. Using a plane mirror optical scheme in 2 axes also allows the Abbe error to be eliminated. The added advantage of the interferometer is that only the plane mirror would reside in the vacuum chamber.

Specifications

  • Orientation: rotary
  • Technology: motorized
  • Number of axes: XY
  • Other characteristics: open-center, under ultra-high vacuum

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