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ABRS series

Article: 00090331

Rotary positioning stage / air bearing / 1-axis / low-profile

The ABRS series of Air-Bearing Direct-Drive Rotary Stages are designed for use in applications that require high accuracy angling, such as in metrology, x-ray diffraction units, wafer inspection, optical fabrication and inspection, and nanotechnology device manufacturing. These rotary stages also offer high velocity stability and optimized angular positioning in a compact design.

Specifications

  • Orientation: rotary
  • Technology: air bearing
  • Number of axes: 1-axis
  • Other characteristics: low-profile, high-precision

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In this category | In this category, (Aerotech)

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