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Article: 00090408

Rotary positioning stage / piezoelectric / 1-axis

Piezoelectric Rotary Stage
Dynamic Structures and Materials offers custom design capabilities for rotary and linear piezo stages required for unique positioning applications and environments. DSM's flexure mechanism designs are used in micropositioning and nanopositioning applications where backlash- and stiction-free performance are critical.

A representative example of a custom, multi-axis design required a +/-0.25 degree rotational stage mounted to two manually-adjustable flexure stages for 0.5mm linear travel and +/- 2 degree rotation (not shown). The rotary stage was designed for closed-loop operation using an eddy current proximity displacement sensor and DSM's SA servo amplifier. The total footprint of the assembly is approximately 25 x 60 mm.

In the actual closed-loop application, this stage achieved the desired move and settle operation for 10% of the full scale rotation within 10 msec.

Specifications

  • Orientation: rotary
  • Technology: piezoelectric
  • Number of axes: 1-axis

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