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IC6 series

Article: 00091360

Thin-film deposition controller for semiconductor and vacuum coating process

The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your position process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 A/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.

Features at a Glance

INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
Auto Z improves thickness accuracy b automatically determining the Z-ratio as material is deposited
Co-deposition of up to six sources simultaneously
Color TFT LCD display makes it easy to see what's going on with your process
+/-0.0035 Hz over 100ms sample
USB data storage for screen shots, recipe storage and data logging

Specifications

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