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Other gas analyzers

AMETEK Process Instruments

1 - 300 AMU | DyMaxion RGA

Article: 00097628

Residual gas analyzer / digital / rack-mounted

The data acquisition and control electronics of the "zero footprint" Smart Sensor Residual Gas Analyzer can be mounted directly on the sensor. It can be connected to a computer via its RS-232 port or RS-485 port for multiple analyzer instruments. It features numerous features besides its zero footprint as a smart sensor. Its ion source options include an enclosed ion source for CVD and sampling of various atmospheric conditions, a conductance limited ion source for PVD applications, an open ion source for UHV applications, and 100, 200 and 300 AMU ranges.

On-board analog and digital I/O zero drift electrometer amplifier technology is optionally available. It includes on-board diagnostics RS-232 and RS-485 communications ports. Being the least costly of the ionizer types, the Open Ion Source has the simplest design and can be inserted directly into the vacuum chamber at pressures of 10-4 Torr, straight into the sample gas.

Specifications

  • Measured value: residual gas
  • Technology: digital
  • Portability: rack-mount

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