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Other industrial video cameras

4D Technology

FlexCam

Article: 00099923

High-resolution camera module / compact

The FlexCam is a compact, high resolution 3D metrology module for in situ roll-to-roll measurement of substrates, barrier films and intermediate layers. FlexCam modules provide sub-nanometer vertical resolution and micrometer-scale lateral resolution for in-process roughness and defect quantification.

Surface roughness and defects affect the longevity of components deposited on substrates. FlexCam enables real-time monitoring and control of roughness to less than 0.5nm rms, both inclusive of and exclusive of defects on the film. The system provides accurate measurement despite runout, web flutter, and other effects which can vary the relative location of the substrate with respect to the measurement system. No other system can match its performance.

FlexCam also identifies and quantifies defects, registering their position within the roll. Multiple defect statistics are calculated including area, volume, depth and slope, with user-selectable pass/fail criteria as each metric can have adverse effects on barrier or end device performance. Extrinsic versus intrinsic defects can be discriminated to help isolate their root cause. Where bright-field inspection systems are sensitive to the backside of the film as well as the roller surface, 4D?s FlexCam is immune to such effects, measuring only the top surface.

Specifications

  • Technology: high-resolution
  • Other characteristics: compact

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