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  • PECVD deposition machine / thermal evaporation / sputtering

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Article: 00155007

PECVD deposition machine / thermal evaporation / sputtering

Chamber Vertical Coating technology Thermal evaporation and sputtering Glow discharge/etching ECVD base coat?? PECVD top coat NOS?SiOx Medium Frequency? Polycold trap in chamber

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