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  • 2/3-axis positioning system / rotary / industrial / displacement measuring interferometer

Article: 00101909

2/3-axis positioning system / rotary / industrial / displacement measuring interferometer

ZMI!" Series - Displacement Measuring Interferometers
ZMI!" components can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI!" customers.

2-Axis System
2-Axis System (Vacuum)
3-Axis System
Flat Panel Application

Specifications

  • Number of axes: 2/3-axis
  • Features: rotary
  • Applications: industrial
  • Other characteristics: displacement measuring interferometer

Other items

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