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  • Film thickness measuring machine

Aleris Series

Article: 00104915

Film thickness measuring machine

Film metrology tools in the Aleris family utilize BBSE technology and are capable of making precise and reliable measurement of film thickness, stress, refractive index and composition for the 32nm node and onward. When BBSE technology is utilized, these systems form a comprehensive solution for metrology, and help fabs monitor and qualify a wide film layer range.

Spectroscopic ellipsometry with patented broadband technology is used to deliver the precision and stability required for the monitoring of films. Different Aleris models can share recipes, and this technology facilitates a flexible strategy for process control within the fab, which covers film applications at the high end and low end. There is also a recipe database management function which allows for easy recipe management and creation, which can be done remotely. An optional feature is a StressMapper, which provides advanced capability for stress measurement and assists chipmakers with process issue identification.

Specifications

  • Applications: film

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