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  • Differential pressure sensor / piezoresistive / silicon

SE106

Article: 00113843

Differential pressure sensor / piezoresistive / silicon

The SE106 is a piezoresistive sensor die especially designed for flow meter applications. Hence this model is able to measure differential pressure, static (line or system) pressure, and temperature of pipeline at the same time. In order to measure two kinds of pressures simultaneously, the SE106 consists of two silicon diaphragms, one for differential pressure measurement and the other for static pressure measurement. Its temperature measurement is achieved by using the on-chip thermistor. The SE106 is available in silicon-on-glass structure with the dimensions of 3.45mm x 4.05mm x 1.4mm. The glass constraint is inevitable for this model. SE106 wafer Before packaging, each SE106 sensor die is tested and inspected.

Specifications

  • Type: differential
  • Technology: piezoresistive, silicon
  • Pressure range: Min.: 0 bar (0 psi)

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