Implement Industry Ideas
  • Thermal flow meter / mass / for gas / in-line
  • Thermal flow meter / mass / for gas / in-line

CMS

Article: 00133469

Thermal flow meter / mass / for gas / in-line

The CMS is a highly reliable gas mass flow meter that uses Yamatake's µF (MicroFlow) sensor as its sensing element. The µF sensor is a MEMS thermal mass-flow sensor cpable of measuring ultra-low flow rates. The integration of the µF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost.

Specifications

  • Technology: thermal, mass
  • Fluid: for gas
  • Mounting: in-line

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