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KLA - TENCOR

  • Base station

300/300Z

Article: 00141286

Base station

Deployed robotically from the SensArray Base Station using standard wafer handling equipment, the Integrated or Integral SensorWafer begins its survey of the production path. When the process is complete, the base station manages downloading and communication of wafer data. The 300mm base station is built into a front opening unified pod (FOUP) to protect and transport the Integrated or Integral SensorWafer throughout the most advanced, automated fabrication facilities, and enables use with a variety of load port variations.

The Base Station is the central operating hub for the Integrated or Integral SensorWafer allowing you to:

Upload the thermal measurement survey requirements to the Integrated or Integral SensorWafer, including sensor selection and scan rate
Download thermal survey data from the Integrated or Integral SensorWafer
Recharge the batteries in less than ten minutes
Transfer survey measurement data immediately to a computer through a USB link

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