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Heat Treatment Furnace Equipment

Specs Scientific Instruments

  • Thermal cracker

TGC-H

Article: 00059060

Thermal cracker

Thermal Gas Cracker TGC-H

Features:

Mounting flange: 2.75" (NW35CF)
In vacuum length: 200 mm
In vacuum diameter: 34 mm max.
Bakeout temperature: 200° C
Beam Divergence: ?15° half angle
Gas Flow: 10-5 - 1 sccm
Operating Pressure: Hydrogen Flux: 5 x 1013 atoms/cm2 at 10 cm distance
Cracking efficiency: Approaching 100 %
E-beam Power: 0 - 60 W

Applications:

Damage free in-situ cleaning e.g. of GaAs, InP, Ge and Si.
Removal of residual oxygen and carbon by reduction to volatile hydrides
Low temperature cleaning
Surfactant - promoting 2-D growth
Post growth surface treatment/improvement
Chemical passivation and surface reconstruction
Annealing of amorphous silicon

Product Description:
The SPECS TGC-H is a fully UHV compatible thermal gas cracker source using electron bombardment heating of a tungsten capillary to thermally dissociate the gas passing through it. The cracking efficiency is determined by the equilibrium thermodynamics of the dissociation of hydrogen molecules into atoms. For capillary temperatures of 1400° C or more and pressures below 10-8 mbar this is nearly 100%. The small size and thermal mass of the capillary means that very little power is required with negligible heat load into the system. The filament itself is easy to replace. Moreover, no differential pumping is needed for operation in UHV and due to the electrically grounded capillary zero ion emission is achieved.

Specifications

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