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  • Combustion analyzer / stack gas / ammonia / for the semiconductor industry

ENDA-C2000 Series

Article: 00026554

Combustion analyzer / stack gas / ammonia / for the semiconductor industry

Overview

The ENDA-C2000 Series is a lineup of units for the continuous monitoring of residual NH3 contained in emissions from ammonia dry method denitrification equipment. Measurement is highly accurate thanks to the use of a new drift-free chemiluminescent analysis (CLA) device. Used in semiconductor fabrication plants, the units are designed to provide a long life. The units are simple to use thanks to such features as an integrated analysis and operating instruments, front-panel operation, and self-diagnosis. The units are well suited for denitration catalyst inspection, controlling NH3 injection volumes, the prevention of ammonium sulfate crystal formation, facilities inspection, and process control.
Features

The units are equipped with a new drift-free chemiluminescent analysis (CLA) device.
The units are capable of a minimum range of 0ppm-10ppm for NH3 and NOx.
The units are equipped with a revolutionary magnetopneumatic method oxygen analysis device that works using oxygen's ordinary magnetism.
Front-panel operation offers enhanced ease of use.
Equipped with numerous functions, such as computer monitoring of analysis conditions, control, data processing, and memory, the units are simple to use and require minimal maintenance.
The units are fully equipped with self-diagnostic functions.
The units can be configured to meet the needs of a wide range of installation sites.

Specifications

  • Measured value: combustion, stack gas
  • Gas type: ammonia
  • Domain: for the semiconductor industry
  • Other characteristics: monitoring, continuous

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