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Conventional Microscopes

Confovis Gmbh

  • Optical microscope / LED illumination / measurement / for wafers

L200, L300

Article: 00031866

Optical microscope / LED illumination / measurement / for wafers

The confovis system NIKON L200 or L300 is particularly suitable for the detailed measurement of wafers in the semiconductor industry. As the smaller version, the wafer microscope systems supply razor-sharp details and precise measurements down to the nanometre range. For professional handling and perfect positioning, wafer disks are used in combination with micro-positioning tables. In this way, precious data regarding the surface details of wafers can be determined in the development, in testing or directly in the production. The measuring system solves classical measuring tasks such as roughness, topology or microgeometry measurements down to depth resolution in the nanometre range. With a measuring and working range of 200 or 300 mm, the confovis measuring system has been designed for typical wafer sizes.

Specifications

  • Type: optical
  • Options and accessories: LED illumination
  • Technical applications: measurement
  • Other characteristics: for wafers

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