• Bellows pump / metering / for the semiconductor industry

Article: 00038050

Bellows pump / metering / for the semiconductor industry

The Metering Bellow Pump is a self-primming equipment used for various semiconductor industry application. It operates through pumping the fluid between two chambers. It features a lesser frequency compared to an equivalent diaphragm pump. This enables the pneumatic pump to have a lengthened serviceability life. Through its minimal frequency level and its amplitude, a reduced degree of particle contamination is guaranteed. A maximum air pressure of 5 bar and a maximum back pressure of 5 bar are both integrated.

The pump is produced with TEFLON® (PTFE, PFA HP and FEP) features. Its sections are made of a high technology materials including the PVDF and PEEK properties. An extensive air consumption of 13,5 m^3/h can be attained through a maximum air connection of 4 mm I.D.

Specifications

  • Type: bellows
  • Applications: metering
  • Domain: for the semiconductor industry

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