• ArF light source / UV / high-power / for photolithography

193 nm, 15 mJ | XLR 600ix

Article: 00189888

ArF light source / UV / high-power / for photolithography

Cymer's XLR 600ix is the worlds first field selectable argon fluoride (ArF) light source technology, specifically designed to adapt to the changing power requirements on the fab floor. The XLR 600ix is a 60W to 90W flexible ArF light ...

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