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Inspection machines for the electronics industry

KLA - TENCOR

  • Mapping system / wafer

RS-200

Article: 00069209

Mapping system / wafer

Based on proven industry resistivity mapping standards, the RS-200 resistivity mapping system offers reliable and accurate sheet resistance measurement for 45 nm and over. In order to meet today's production requirements for 300 mm wafers, capabilities such as improved edge performance and advanced automation are provided by the resistivity mapping.

Enhanced performance for both 200 mm and 300 mm wafers is achieved due to the resistivity mapping's repeatable and accurate resistivity measurements to 1 mm from the conductive film edge.

Meeting today's production requirements, the system-to-system/fab-to-fab matching, long-term repeatability and accuracy are provided by the patented temperature compensation.

Easy-to-use software based on the Windows XP operating system is included with the RS-200 resistivity mapping system. This results in quicker recipe set-up and data analysis.

Specifications

  • Options: wafer

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