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Motorized Single Axis Linear Positioning Stages

Micos

max. 305 mm, max. 600 mm/s | UPS-150 series

Article: 00090704

Linear positioning stage / motorized / single-shaft / high-precision

The Ultra Precision Stage UPS-150 was specifically designed for sub-surface wafer inspection, fiber alignment, high precision robotics and for all tasks where a maximum of positioning accuracy and reliability is absolutely mandatory.
All ultra precision stages UPS-150 are equipped with a linear scale which is centrally installed between the guides. Two limit switches protect against accidental over-travel. Due to high-quality cross-roller bearings a maximum of load capacity and smooth motion is guaranteed. Special, stress-relieved, tempered aluminum-alloy guarantees a homogeneous non-warping stage structure. The structural series 150 is driven by iron-less linear motors and provides high acceleration and high travel speed. System accuracy below 1µm/100mm travel and a bi-directional repeatability of less than 0.025 µm is guaranteed. The ultra precision stages are supplied with certificate of performance (flatness, straightness, pitch, yaw & position). The measurement is made with the stage mounted and unloaded on granite with a flatness

Specifications

  • Orientation: linear
  • Technology: motorized
  • Number of axes: single-shaft
  • Other characteristics: high-precision

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