MIPOS R 120

Article: 00090678

Tilt positioning stage / for microscope objectives

characteristics:

- 150 µm focusing range
- precise movement of the lens revolver
- high resonant frequence
- sustainability of up to 5 kg
- optional: integrated positioning sensor
- active tilt correction
- different attachments for microscopes from different manufacturers
- positioning solution in the microscope set-up

applications:

- surface analysis
- semiconductor equipment
- interferometry
- biotechnology (e.g. cell inspection)
- ray focusing for print processes

The MIPOS R 120 serves for the fine focusing and positioning of microscope objectives. The MIPOS R 120 was especially developed for the positioning of a complete lens revolver of a microscope. It is possible to focus probes with a sub nanometer precision. Due to the well proven parallelogram principle of piezosystem jena and an integrated pre-load, a highly parallel movement is guaranteed without influencing the optical axis.

Therefore rapid and exact movements can be operated with a short rise time.

Special highlight of the MIPOS R 120 is that the operator can switch between the lenses of the objective revolver without changing the set-up, and without losing the focus on the probe. This saves the user a significant amount of time.

Optionally, special solutions for the integration of the MIPOS R 120 in the microscope main body, arm, base etc. can also be offered.

Specifications

  • Technology: tilt
  • Product applications: for microscope objectives

Other items

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