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Multi Gas Analyzers

Eurovacuum B V

XPR3L

Article: 00090888

Multi-gas analyzer / for process gas / panel-mounted

Solar Cell and LCD Process Yield Optimization by Monitoring Gas Pressures, Detecting Contaminants, and Locating Leaks

Monitoring process gases and base vacuum conditions is affordable and efficient with the Transpector ® XPR3L Gas Analysis System. PVD process monitoring with the XPR3L provides real-time data on process gas pressures, gas ratios, contamination levels, impurities, and leaks. This information can be used to maximize both process yield and product quality. Background monitoring with the XPR3L can make preventive maintenance programs more efficient and effective by quickly detecting and diagnosing leaks and contaminants.

Specifications

  • Measured value: multi-gas, for process gas
  • Portability: panel-mount

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