CPM series

Article: 00090864

Multi-gas analyzer / panel-mounted / in-situ

INFICON Transpector® CPM provides in situ early warnings and lowers costs by:

measuring gas phase reactions
verifying vacuum integrity
identifying trace-level contaminants
measuring process and background composition
qualifying gas purity


The INFICON CPM Compact Process Monitor is a full-featured, compact and affordable gas analyzer that's ideally suited for in situ monitoring of complex processes. This dry-pumped system uses the proven technology of the INFICON Transpector 2 Gas Analysis System to help achieve new levels of performance.

Specifications

  • Measured value: multi-gas
  • Portability: panel-mount
  • Other characteristics: in-situ

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