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SQC-310 series

Article: 00091361

Thin-film deposition controller for semiconductor and vacuum coating process

With advanced electronics, an improved display, and a very affordable price, the INFICON SQC-310 Series gives you features not found on competitors' thin film controllers. And you can choose the ideal model for your application: sequential deposition (SQC-310) or co-deposition (SQC-310C).

Features at a Glance

Bright 1/4 VGA active matrix color LCD display - available in English or Chinese
Standard RS-232 and USB (RS-232 and Ethernet optional)
Easy setup and operation with a "Quick Setup" Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
Windows® program for developing, testing, and downloading processes, and for logging instrument data to your PC for process analysis and quality control
Accurate process control, especially for low deposition rates, with ±0.03 Hz resolution at 10 readings/second
Storage capacity for up to 100 processes, 1,000 layers, 50 films
Monitoring of source material with a single sensor or with multiple sensors to provide accurate source distribution monitoring

Specifications

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