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NDT: coating thickness gauges, corrosion gauges

Izovac

Invisio S

Article: 00091369

Thin-film deposition controller for semiconductor and vacuum coating process

Application:

Control of the process of sputtering quarter-wave and not-equally-thick coatings
Monitoring and control of coatings deposition process in vacuum sputtering systems.
Multi-layer, not ?equally-thick optical coatings can now be sputtered with much higher precision and recurrence thanks to the use of spectral optical control system INVISIO-S. The system allows to monitor the change of the whole growing coating spectrum directly in the course of sputtering , and make layer-by-layer coating correction.

Types of coatings being controlled:

Optical filters
Spectrum dividers
Laser coatings
Mirrors
IR-coatings
Other multi-layer optical coatings of UV, visible, near IR ranges
Merits:

Adaptability of system INVISIO-S to any vacuum coaters
The optical system is of modular design and uses optical fibers, which allows to install it in any vacuum coater irrespective of configuration.

Specifications

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