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  • Linear nanopositioning stage / piezoelectric / Z-axis

FOC series

Article: 00101844

Linear nanopositioning stage / piezoelectric / Z-axis

The FOC are nanopositioners dedicated to microscope objective accurate positioning. They are offered with 100, 200 or 300 microns of travel. The FOC is used in a wide range of applications : Z-stack, automated focus or together with automated thermal expansion compensation (for example CRISP from ASI Imaging). It is made from aluminium and brass, and is equipped with sensor offering stability in the picometer level.

The brass mounting ring can be easily exchanged so that any objective can be used with the FOC nanopositioner. The threads which are available are : RMS, M25, M26, M27 and M32.

Features :
Travel range up to 300 µm
Moves objectives with sub-nm resolution
Parallel flexure guiding
Closed loop control
Silicon sensor technology
Less than 30pm noise floor

Applications :
Interferometry
Autofocus system
3D imaging
Confocal microscopy
Super resolution microscopy
Semiconductor metrology

Specifications

  • Orientation: linear
  • Technology: piezoelectric
  • Number of axes: Z-axis
  • Stroke: Min.: 100 µm

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