Implement Industry Ideas
  • Portal positioning system / for wafer inspection and metrology
  • Portal positioning system / for wafer inspection and metrology
  • Portal positioning system / for wafer inspection and metrology
  • Portal positioning system / for wafer inspection and metrology
  • Portal positioning system / for wafer inspection and metrology
  • Portal positioning system / for wafer inspection and metrology

Article: 00101681

Portal positioning system / for wafer inspection and metrology

Customized Flat Panel Display solutions

Our solution for the demanding FPD industry covers processes from AOI to array tester over photo spacer measurements. More than 800 systems are installed worldwide. Some systems are directly manufactured and assembled in Asia

In order to reduce to TCO SCHNEEBERGER innovates by integrating our own alternative to granite: Mineralcast.

This caste high damping structure helps to optimize, for example, the total system weight which reduces the handling and shipping costs.

Learn more about Mineral cast

Typical specifications for "large format systems" at POI*
- Configuration: XYZ or + Z (gantry)
- Travel: up to 3500 x 2700mm
- Accuracy: ? 10 µm (over TIR, mapped)
- Repeatability: ? 2 µm
- Stability: ? 10 nm (within 1s ptp)
- Move & Settle: - Cst velocity: - Straightness: - Flatness:

Specifications

  • Features: portal
  • Applications: for wafer inspection and metrology

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