• Thermal oxidizer / for VOC reduction / for NOx reduction
  • Thermal oxidizer / for VOC reduction / for NOx reduction

Iberica series

Article: 00105684

Thermal oxidizer / for VOC reduction / for NOx reduction

Iberica Vacuum offers their customers electrically-heated oxidation systems for the removal of pyrophoric and acidic gases commonly found in semiconductor applications. The HOx (Hot Oxidation System) offers an innovative electrical heated oxidation unit and the proven three-stage wet scrubber of the combustor product line, it combines superior performance for the abatement of CVD processes in facilities which do not have the ability to fuel gas.

Specifications

  • Technology: thermal
  • Applications: for VOC reduction, for NOx reduction

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