• Diaphragm vacuum pump / single-stage / dry / industrial

iH160 series

Article: 00109789

Diaphragm vacuum pump / single-stage / dry / industrial

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Specifications

  • Technology: diaphragm
  • Number of stages: single-stage
  • Lubrication: dry
  • Applications: industrial
  • Flow rate: 165 m³/h (5826.92 ft³/h)
  • Ultimate vacuum: 0.01 mbar (0 psi)

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