• Edge polishing machine / automatic

max. 300 mm | EPD-300-X, EPD-200-X

Article: 00111035

Edge polishing machine / automatic

The SpeedFam EPD is an Edge Polisher for improving wafer edges on 300mm, 200mm and 150mm patterned wafers. In comparison with etching or other edge processing such as simple cleaning, the EPD uses slurry polishing action to improve wafer edges drastically. It is equipped with a post polish clean unit to achieve dry in dry out processing.

Specifications

  • Technology: edge
  • Control: automatic

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