• Gas sampling system / for analysis
  • Gas sampling system / for analysis

Article: 00122182

Gas sampling system / for analysis

Pressurized Gas Sampling System

The unique solid-state sampling system and off-line analytical service from SAES Pure Gas have been developed to provide end-users of leading edge lithography and inspection/metrology equipment with a dedicated, simple, and reliable tool for optics purge gas certification. Utilizing solid-state traps the CollectTorr Sampling System can measure parts per trillion (pptV) levels of molecular acids, bases, refractory and organic contaminants.

SAES Pure Gas analytical sampling, analysis and certification are compliant with lithography and inspection/ metrology tool optics warranty certification requirements.

Specifications

  • Sample type: gas
  • Applications: for analysis

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