RITM Industry

address+38 044 331 91 18
mon-fri: 09.00-18.00
e-mail: sales@ritmindustry.com

x

Price request

+38 044 223 09 23
+38 050 102 89 91
sales@ritmindustry.com

Scrubbers

Das Environmental Expert

  • Wet type gas scrubber / chemical / high-efficiency

AQUABATE EPI

Article: 00123130

Wet type gas scrubber / chemical / high-efficiency

Treatment of Process Waste Gases from Epitaxy with AQUABATE EPI

AQUABATE EPI was specifically designed to treat waste gases of epitaxy processes in the semiconductor industry. The scrubber meets the high safety standards that are necessary when using hydrogen as a process carrier gas. After the scrubbing process, the hydrogen is safely diluted to its lower explosion limit (LEL). The waste gases are introduced through up to three separate connections, specifically designed to prevent blockages. Both inlets and feed lines have an optional heating system. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals.


Features

Semi S2 compliant
No Inlet clogging
Small Footprint

Technical Data

Dimensions (W x D x H):
1020 mm x 930 mm x 1800 mm
Access to maintenance area on front and back side
Gas entry: max. 3 x DN40
Gas outlet: DN40

Specifications

  • Type: wet type
  • Type of gas: chemical
  • Other characteristics: high-efficiency

Other items

In this category | In this category, (Das Environmental Expert)

Leave request for price calculation right now, we will send you best prices.

LLC "RITM INDUSTRY"

1-B Magnitogorska Str. 

Kyiv, UA-02094

+38 044 223 09 23

info@ritmindustry.com

RITM Industry © 2015 -