• Storage server / rack-mount

KT-98e

Article: 00123558

Storage server / rack-mount

The KT-98e image-capable data server is part of the Total Data Management strategy from KLA-Tencor. The KT-98e server supports KLA-Tencor?s advanced reticle inspection systems, including the Teron, TeraScan, and TeraStar-Series as well as KLA-Tencor’s legacy tools.

Central data management systems serve all KLA-Tencor reticle inspection equipment with significant speed, storage and reliability improvements over the KT-9Xi data management server system.
Supports the storage and retrieval of setup and results files, as well as many statistical analysis features.
Inspection results with or without defect images are readily available for transfer to other equipment for defect repair, printability study, reticle to wafer defect tracking, and statistical process control.
Inspection recipes or data can be shared among different generations of KLA-Tencor inspection products.
Inspection reports can quickly be moved to other
users via remote login, backup and auto-print functions.

Specifications

  • Type: storage
  • Mounting: rack-mount

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