• Laser sorting system / automatic / wafer

IL 2600

Article: 00125832

Laser sorting system / automatic / wafer

The InnoLas IL 2600 wafer sorting system can automatically sort, split, merge and transfer wafers from any slot / cassette to any other slot / cassette in a six cassette array. Wafer sizes from 100 mm to 200 mm can be handled in a single or multi-batch operation without the need of any mechanical adjustments.

The laser mark code read for verification can be located at any position on the front and/or backside of the wafer.

The basic model has one reading unit (OCR, BC412, T7) for reading the laser code on the frontside of the wafer. A second reading unit (OCR, BC412, T7) for reading the code on the backside of the wafer can be mounted as an option.

Specifications

  • Type: laser
  • Operational mode: automatic
  • Product applications: wafer

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