• Pressure controller
  • Pressure controller
  • Pressure controller

EC-5000 series

Article: 00138191

Pressure controller

Horiba EC-5000 series chamber exhaust pressure controller has the ability to consistently maintain the user-set pressure in the chamber. A quick and high-resolution response is assured thanks to the high-resolution stepper motor and innovative butterfly valve.

Also included in the range of HORIBA STECs pressure control system components is the UR-7300 series of ultra clean automatic pressure regulators and the PV (piezo valve) series of fast response valves featuring piezo actuators along with metal O-rings.

The lineup of HORIBA STECs includes EMTGC1B-A (a small-sized differential pressure sensor) and (PCU-3000) (controller) for the creation of an exhaust pressure control system.

Specifications

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