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  • Ball bearing positioning stage / piezoelectric / multi-axis / miniature

max. 1.2 mm/s | MS30

Article: 00139645

Ball bearing positioning stage / piezoelectric / multi-axis / miniature

The MS30 series is manufactured by Mechonics, and is a piezo driven step motor that integrated with low hysteresis. It can hold reached position without current, which has a step width of 10 nm depending on the controller. There is a positioning accuracy that is better than 50 nm, which has a velocity of up to 1.2 mm/s.

Specifications

  • Technology: ball bearing, piezoelectric
  • Number of axes: multi-axis
  • Other characteristics: miniature, vacuum-compatible, precision

Other items

In this category | In this category, (MechOnics Ag)

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