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  • High-resolution diffractometer / X-ray
  • High-resolution diffractometer / X-ray
  • High-resolution diffractometer / X-ray
  • High-resolution diffractometer / X-ray
  • High-resolution diffractometer / X-ray
  • High-resolution diffractometer / X-ray

0.0001' | X'Pert MRD

Article: 00144332

High-resolution diffractometer / X-ray

The long and successful history of PANalytical’s Materials Research Diffractometers (MRD) continues with a new generation ? X?Pert³ MRD and X?Pert³ MRD XL. The improved performance and reliability of the new platform have added more analytical capability and power for X-ray scattering studies in:

? advanced materials science
? scientific and industrial thin film technology
? metrological characterization in semiconductor process development

Both systems handle the same wide range of applications with full wafer mapping up to 100 mm (X?Pert³ MRD) or 200 mm (X?Pert³ MRD XL).

Specifications

  • Options: high-resolution, X-ray

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