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  • Wavelength dispersive X-ray fluorescence spectrometer / process / multi-channel
  • Wavelength dispersive X-ray fluorescence spectrometer / process / multi-channel
  • Wavelength dispersive X-ray fluorescence spectrometer / process / multi-channel
  • Wavelength dispersive X-ray fluorescence spectrometer / process / multi-channel
  • Wavelength dispersive X-ray fluorescence spectrometer / process / multi-channel

2830 ZT

Article: 00142252

Wavelength dispersive X-ray fluorescence spectrometer / process / multi-channel

The 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) wafer analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, PANalytical?s 2830 ZT Wafer Analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm.

Specifications

  • Type: wavelength dispersive X-ray fluorescence
  • Domain: process
  • Other characteristics: multi-channel

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