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  • Electrostatic precipitator / wet
  • Electrostatic precipitator / wet

Article: 00046258

Electrostatic precipitator / wet

The range of exhaust conditioning products includes the Pyrophoric Conditioning System (PCS) for the self oxidation of silane, the Water Cooled Exhaust Trap (WCT) for LPCVD nitride processes and the Wet Electrostatic Precipitator (WESP) for additional powder removal. For the removal of silane and pyrophoric gases to below explosion level (LEL) the PCS (Polyphoric Conditioning System offers and advanced solution. Specifically designed for the safe handling of silane, the PCS incorporates a unique partcle hadling system to keep ducts free from powders.

Specifications

  • Options: wet

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