Implement Industry Ideas
  • Modular system wet bench
  • Modular system wet bench

VertiClean

Article: 00071565

Modular system wet bench

The VertiClean Advanced Photomask Processor is a modular wet bench for single substrate processing, i.e. photomasks of sizes 6" x 6" or larger, guaranteeing ultimate process results.

The modular system architecture with immersion tanks, made of quartz or PVDF, and a flexible process flow with random access to the individual process tanks can be customized for all wet processes.

Applications
Quartz etching with HF
SPM and SOM cleaning
SC1 and SC2 cleaning
Megasonic cleaning
IPA/N2 drying
VUV/ozone cleaning
Custom applications

Specifications

  • Options: modular system

Other items

In this category | In this category, (ACP - Advanced Clean Production GmbH)

Leave request for price calculation right now, we will send you best prices.