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Manual Positioning Stages

IKO Nippon Thompson Europe

SA

Article: 00082773

Linear positioning stage / rotary / crossed roller / motorized

The IKO Alignment Stage SA utilizes the IKO C-Lube Linear Way L within the linear motion rolling guide component of the unit, IKO Crossed Roller Bearings in the revolving guiding component, and a direct-drive system within the driving component. An alignment stage is used to achieve the low cross section, compact XY? movements.

The high accuracy positioning operation of this unit is achieve without backlash, through the combination of the high resolution linear scale and a full closed loop control. The IKO Alignment Stage SA is suitable alignment processing utilizing image processing typical to semiconductor and liquid crystal manufacturing equipment, in addition to being used as a positioning mechanism for measuring equipment and inspection instruments that need clean environments for operation.

Specifications

  • Orientation: linear, rotary
  • Technology: motorized, crossed roller
  • Number of axes: 1-axis, XY
  • Other characteristics: compact

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