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Motorized Multi Axis Linear Positioning Stages

Alio

150 - 10 000 g

Article: 00090317

3-axis nanopositioning system / tripod / for wafer inspection and metrology / with parallel kinematics

The ALIO 3 axis patented Tripod with ceramic servo motors integrated with ALIOs nano precision stages has all the advantages of a Hexapod platform from a motion and kinematic standpoint with large advantages in stiffness, work envelope, path precision and an order of magnitude more precision for True Nano ? applications. The product family ranges from 150 grams of mass to 10 kg or mass.

Nano manufacturing has influenced all tools and products for the past 15 years but especially in the past 5 years manufacturing, nano structures, nano particles, nano drug discovery/delivery, nano level DNA, nano metrology and nano machines have pushed legacy equipment even Hexapod principles this is why ALIO developed the Tripod integrated systems in 2001 for these application where 6-D Nano Precision ? is required.

Specifications

  • Number of axes: 3-axis
  • Features: tripod
  • Applications: for wafer inspection and metrology
  • Other characteristics: with parallel kinematics

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