Article: 00090298

Linear stage / motorized / XYZ

The three-axis positioning-force control stage uses an ?H? gantry framework as the base and two independent liner stepper motors (X and Y) and a voice-coil stage mounted on a moving table (Z) for the axes control. The 2-phase brushless closed-loop hybrid motors are mounted on the gantry base plate and the voice-coil stage is fitted onto the Y-axis. The voice-coil stage can offer position control, as accurate as 0.1µm, with force monitoring or force control, as accurate as 10 g, with position monitoring using a simple closed-loop control.

Specifications

  • Orientation: linear
  • Technology: motorized
  • Number of axes: XYZ
  • Stroke: 245 mm

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