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Ovens

Koyo Thermos Systems

  • Annealing oven / cabinet / electric

CBS series

Article: 00105200

Annealing oven / cabinet / electric

Batch clean ovens suitable for the LTPS treatment.
Standard model satisfying both specification and cost.
Also capable of atmosphere treatment.
The original sealed structure has enabled the atmospheric process.
With the ultra high HEPA filter adopted,the maximum available temperature at 500? has been achieved.
Cycle time reduction is possible by oven rapid cooling system and/or speedy substrate-transfer.

Specifications

  • Function: annealing
  • Configuration: cabinet
  • Heat source: electric
  • Maximum temperature: Min.: 80 °C (176 °F)

Other items

In this category | In this category, (Koyo Thermos Systems)

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