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Ovens

Yield Engineering Systems

  • Annealing oven / roller / electric / vacuum

PB-HV Series

Article: 00105169

Annealing oven / roller / electric / vacuum

The YES-PB-HV series of manual load high vacuum ovens is designed for today?s most demanding MEMS and semiconductor process applications. These tools are designed to ensure moisture and hydrogen removal using high vacuum (10-5) and high temperature (up to 450°C). Our patented nitrogen purge precedes process ramp and creates a successful procedure for improved MEMS lifetime and performance.

Nitrogen purge also results in a low oxygen environment which allows for proper copper annealing or aluminum annealing.

Specifications

  • Function: annealing
  • Configuration: roller
  • Heat source: electric
  • Atmosphere: vacuum
  • Applications: for microelectronics industry
  • Maximum temperature: 550 °C (1022 °F), 450 °C (842 °F)

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