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Ovens

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  • Vacuum oven / heating / bench-top / electric

RTP-150-HV

Article: 00105212

Vacuum oven / heating / bench-top / electric

RTP-150-HV (High Vacuum), front loading

High vacuum compliant Rapid Thermal Process Oven with ramp up rate up to 75 K/sec.

Key features are
good temperature uniformity
precisely controlled ramp-up rates and fast ramp-down rates
low process turnaround
comfortable gas control
table top system with small foot print

Multipurpose table top unit with front loading drawer for the following applications:
excellent tool for various semiconductor processes
implementing of new semiconductor processes
prototype research
quality control
annealing
Rapid Thermal Processes
SiAu, SiAl, SiMo alloying
low k dielectrics
post implanting annealing
copper paste firing
resistor paste firing
other processes on demand

Specifications

  • Function: heating
  • Configuration: bench-top
  • Heat source: electric
  • Atmosphere: vacuum

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