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Invisio M

Article: 00091368

Thin-film deposition controller for semiconductor and vacuum coating process

Application:
Control of the process of sputtering quarter-wave and non-equally thick coatings
Monitoring and automatic control of coatings deposition process in vacuum sputtering systems.

Systems of one-beam control SFKT-751 received wide recognition among process engineers and operators of vacuum coaters. Still, lately level of tasks being solved in control of optical coatings deposition has greatly risen, that demanded updating of existing systems. Series INVISIO-M is new stage of development of coatings' spectra control methods in the course of sputtering. The use of up-to-date photo detectors in this series allows to monitor the process with greater accuracy and stability.

Types of coatings being controlled:
Optical filters
Spectrum dividers
Laser coatings
Mirrors
IR-coatings
Other multi-layer optical coatings of UV, visible and near IR ranges.

Specifications

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